Abstract: A review is provided based on the authors’ work on the application of atomic force microscopy (AFM) technique, combined with scanning capacitance microscopy, Kelvin probe microscopy, local electromagnetic characterization, and image 3D processing, to the characterization of the morphology of micro–nano surfaces and interfaces of innovative materials with focus on nanodiamond powders and PDMS-Au nanomaterials. Other aspects such as the production of AFM image artifacts related to the samples analyzed are discussed in order to assess the correctness of the AFM measurement procedures and avoid or limit any possible inconvenience. In the last part of the chapter, some general guidelines and recommendations are provided for material characterization by the AFM technique.
Keywords: AFM, SCM, KPM, electromagnetic characterization, 3D image processing, nanodiamond powders, PDMS-Au nanomaterial, image artifacts
